裾引き
"However, development must be stopped at exactly the right moment to avoid footing or undercutting," Dammel said.
"If the resist interacts with the bottom antireflective coating, you can get footing or t-topping and you won't have the perfectly straight sidewall on the resist that you need," Dembowski said.
"However, development must be stopped at exactly the right moment to avoid footing or undercutting," Dammel said.
"If the resist interacts with the bottom antireflective coating, you can get footing or t-topping and you won't have the perfectly straight sidewall on the resist that you need," Dembowski said.
「しかし、裾引きやアンダーカットを避けるため、ちょうど一番いい瞬間に現像を止めなければならない」とDammel氏は言う。
「もしレジストがBARCと混ざれば、裾引きやT-トップ欠陥の問題が起き、レジスト上に直線の側壁は得られない」とDembowski氏は述べている。
「もしレジストがBARCと混ざれば、裾引きやT-トップ欠陥の問題が起き、レジスト上に直線の側壁は得られない」とDembowski氏は述べている。
To this end the lithography patterning process is geared towards symmetry, particularly with regards to footing at the bottom of a line and equivalent 30 sidewalls.
http://v3.espacenet.com/textdoc?DB=EPODOC&IDX=WO02070985&F=0
http://v3.espacenet.com/textdoc?DB=EPODOC&IDX=WO02070985&F=0
